Wet Process Tank Compatibility

With years of experience in many industries, including the semiconductor industry, we learned how to meet a wide variety of material compatibility needs. This table is intended to help engineers specify which wet process tank and cleaning systems best fit their processes, chemistries, and applications. Please contact us for more information regarding material compatibility. Download PDF

Accubath™ Wet Process TanksAccumeg™ Megasonic Tanks
Accubath Quartz Static Heated Tank Etch Process
Accumeg PVDF Megasonic Process Tank with Quick Dump Rinse
Accubath Heated Quartz Process Tank Silicon Nitride Etch
Process Name Chemistry Application Process Tank
Si Iso Etch HNO3+H2O+NH4F Etch Silicon PFA Tank (near ambient)
Oxide Etch 10:1 HF (H2O+49% HF) Etch Silicon Dioxide PFA Tank with heat exchange coils
Buffered Oxide Etch 5:1 (40% NH4F+49% HF) Silicon Dioxide PFA Tank with heat exchange coils
Quickdump Rinse H2O chemical removal PVDF Quickdump
Post Hot Phos Rinse H2O Acid Rinse PVDF Quickdump Megasonic
Post Piranha Rinse H2O Acid rinse, Sulfate removal PVDF Quickdump Megasonic
SC-2, HPM, RCA2, Huang B HCL+H2O2+H2O Metals removal, alkalis and metal hydroxide removal Quartz recirculated Megasonic
SC-1, APM,RCA1, Huang A NH4OH+H202+H2O Particle removal, light organics removal, protective oxide regrowth Quartz recirculated Megasonic
EDP NH2(CH2)2NH2+C6H4(OH)+H20 Anisotropic Silicon Etch Quartz static or recirculated
TMAH TMAH Anisotropic Silicon Etch Quartz static or recirculated
Cu FeCl3 200 Copper etchant type CE-200 from Transene (30% FeCl3 + 3-4% HCl + H2O) Etch Copper Quartz static or recirculated
Cu APS 100 Copper etchant APS 100 from Transene (15-20% (NH4)2S2O8 + H2O) Etch Copper Quartz static or recirculated
NiCr TFN Nichrome etchant TFN from Transene (10-20% (NH4)2Ce(NO3)6) + 5-6% HNO3 + H2O) Etch NiCr Quartz static or recirculated
Al Etch A Al Etchant Type A from Transene (80% H3PO4 + 5% HNO3 + 5% HAc +10% H2O) Etch Aluminum Quartz static or recirculated
CR-14 Chromium etchant CR-14 from Cyantek (22% (NH4) 2Ce(NO3)6) + 8% HAc+ H2O) Etch Chromium Quartz static or recirculated
CR-7 Chromium etchant CR-7 from Cyantek (9% (NH 4)2Ce(NO3)6) + 6% HClO4 + H2O) Etch Chromium Quartz static or recirculated
Aqua regia HCl+HNO3 Etch Gold Quartz static or recirculated
AU-5 Gold etchant AU-5 from Cyantek (5% I2 +10% KI + 85% H2O) Etch Gold Quartz static or recirculated
Moly Etch Molybdenum etchant (180 H3PO4 : 11 HAc : 11 HNO3 : 150 H2O) Etch Molybdenum Quartz static or recirculated
Aqua regia, Dilute Dilute aqua regia (3 HCl : 1 HNO3 : 2 H2O), ~30ºC Etch Noble metals Quartz static or recirculated
Phos+Sulf 1 H2SO4 : 1 H3PO4 Etch Sapphire Quartz static or recirculated
Pad Etch 4 Pad Etch 4 from Ashland (13% NH 4F + 32% HAc + 49% H2O + 6% propyleneglycol + surfactant) Etch SiO2, not Al Quartz static or recirculated
Ti Etch Titanium wet etchant (20 H2O : 1 H2O2 : 1 HF) Etch Titanium Quartz static or recirculated
H2O2 50ºC Hydrogen peroxide (30wt% H2O2, 70wt% H2O) Etch Tungsten Quartz static or recirculated
SA-80 (NH4)SO4+H2SO4 Organics removal Quartz static or recirculated
SOM, Sulfuric/Ozone mix H2SO4+O3 Organics removal Quartz static or recirculated
DIO3, Ozinated water DIH2O+O3 Organics removal, protective SiO2 regrowth Quartz static or recirculated
Microstrip Microstrip 2001 photoresist stripper, 85ºC Photoresist Strip Quartz static or recirculated
Piranha, SPM Piranha (~50 H2SO4 : 1 H2O2) Resist strip, Post-ash residue removal, organic removal Quartz static or recirculated
Phosphoric Phosphoric Acid (85% by weight) Etch Silicon nitride Quartz static or recirculated; Dedicated Nitride Etch System
Proprietary Solvent Resist Strippers Various Solvents Remove Photoresist Quartz Static or recirculated; Stainless Steel (static or recirculated)
IPA Isopropanol Cleaning Stainless Steel static or recirculated
Methanol Methanol Cleaning Stainless Steel static or recirculated
Acetone Acetone Photoresist Strip Stainless Steel static or recirculated
Anisotropic Etch KOH (30% by weight) Anisotropic SiliconEtch PFA Tank with In-Line Heater