The ability to heat a process tank, keep the temperature controlled, and do no damage to the heating element has, like other processes in semiconductor manufacturing, improved over time. With the increased emphasis on throughput and uptime, fabs are hesitant to schedule repetitive preventative maintenance of such items as process tank inline heaters. Other equipment applications in billion dollar fabs are more worthy of maintenance time and talent.
The infrared (IR) heater – often called radiant heating - was the standard in the semi industry for many years. Reflectors to generate increased temperature typically surrounded a quartz heating lamp.
IR (Infrared) heating has its problems:
Resistive heating has its advantages:
In many cases, IR heaters can be replaced by Resistive heaters in existing equipment without making major modifications. By utilizing special sensors and other components Imtec can mimic the functionality of the old heater to eliminate the need for modifications to the control system. In some cases, special mounting brackets or plumbing connections can be used to simplify installation.
In almost any inline heating application, if you are not satisfied with the heater’s performance or reliability, we can help. For more information about our resistive heaters, click here or contact a Imtec representative.