Heated Process Tank

IMTEC LEGACY SYSTEMS

- Refurbished Equipment

- Upgrades

- Service

- Parts

USED EQUIPMENT & SPARE PARTS

KLA and GaSonics Tool Refurbishment

IMTEC has hundreds of front-end semiconductor equipment and parts to meet your needs including name brand and hard-to-find tools. Get your system rebuilt to suit your needs or refurbished to meet the manufacturer's original specifications.

Parts, Service and Upgrades

Looking for parts for your system? IMTEC can deliver thousands of parts and can service or upgrade your existing tools to keep them up and running. Software service or upgrades are also available for many PC-based systems.

Equipment services include:
· Audits
· Installations
· Operator Training
· Full Time On-Site Service
· Preventive Maintenance
· Telephone Technical Support
· NIST Calibration Wafers (PSLs)
· Remanufactured Lasers
· Replacement Lamps & Parts

Contact us today to discuss how we may help you.

List of Tool Brands & Models we Refurbish/Service

GaSonics Models:
GaSonics Aura 1000 (A1000)
GaSonics Aura 2000LL
GaSonics Aura 3010 (A3010)
GaSonics AE 2000LL
GaSonics AE 2001
GaSonics L3510
GaSonics PEP Iridia
Gasonics Plasma Etch 7100 Series

KLA Models:
Surfscan 4000, 5000, 6000, SP1 and SP1 TBI Series
Surfscan 7000 and ATI Series
KLA 21xx Series
KLA UV Series
Tencor Alpha Step Series
Tencor P Series
KLA Resistivity Mapping System
Prometrix FT Series
Prometrix SM Series

Your tool brand or model not listed? No problem contact us today to discuss how we can help.

Spare Parts List: This is only a brief list of OEM parts we offer, if you do not see the part number you are looking for we encourage you to contact us.

KLA SP1 Classic, TBI and DLS
P/N DESCRIPTION
0023889-000 CHUCK,WAFER,VACUUM 150MM,SP1
0023892-000 CHUCK,200/300MM WAFER,VACUUM;SP1
0075923-000 KEYBOARD, DATALUX, W/ADAPTER,SP1-TBI
0105128-000 ASSY,LASER,ARGON,30MW
384054 MONITOR,FLAT PNL,14.1,XGA,SP1
530859 MONITOR,FLAT PNL,15.0,XGA,SP1-TBI
0058917-000 PCB ASSY,MOTION CTRL,4-AXIS,CONFIG
526967 MOTOR BRUSHLESS DRIVER SC903,SNGL AXIS
0065930-000 CPU ASSY,850MHZ CONFIG,TAPE OR JAZ DRIVE
500259 PCB ASSY,TIMING GEN,SP1-TBI
571482 PCB ASSY,ACTUATOR SP1 TBI CONFIG.
0003569-000 PCB ASSY,ANALOG BOARD,CONFIG
376299 PCB ASSY,BACKPLANE,ISA/PCI-2.1
375420 PCB ASSY,BEAM POS CONTR,SP1+
375403 PCB ASSY,BEAM POS SENS,SP1+
338605 PCB ASSY,BI-COLOR LED MONITOR
342874 PCB ASSY,BW SENSOR PREAMP,SP1
378372 PCB ASSY,CARDG PWR DISTR,SP1+
0024013-001 KIT,UPGD CPU 166/200MHZTO850MHZ,SP1-TBI
0019044-000 KIT,UPGRADE,CPU 300/550MHZ TO 850MHZ
350338 PCB ASSY,DAISY KEYBD CNTR,SP1
373494 PCB ASSY,DISTRIB 1,SP1+
373664 PCB ASSY,DISTRIB 2,SP1+
334472 PCB ASSY,LASER NODE,SP1
539228 PCB ASSY,MOTOR DRIVER,SP1 TBI
536237 PCB ASSY,PCLTA-10,NSI BOARD,AP1
371050 PCB ASSY,PMT PREAMP,SP1+
0064742-000 PCB ASSY PWR DISTRIBUTION,SP1-TBI
330710 PCB ASSY,ROBOT INTERFACE,SP1
380970 PCB ASSY,SECS I/O, SMIF
389978 PCB ASSY,SENSR,L2/L3 CH.SP1TBI
569917 PCB ASSY,SIGNAL PROC,SP1 +,CONFIG
333360 PCB ASSY,SPINDLE DISTRIB,SP1
0092493-001 PHOTOMULTIPLIER TUBE,SP1
535044 PIN ASSY,AUTO-CAL,LO SCAT,FRU,SP1-TBI
179515 PMT PWR SUPPLY ASSY,S6200
168807 PWR SUPPLY, LASER, ARGON, 30mW
515434 ULPA ASSY,TOP,W/GORE-TEX,SP1
515426 ULPA ASSY,W/GORE-TEX,SP1-TBI
0048209-001 SPINDLE, SP1
0048210-000 CONTROLLER, SP1 SPINDLE
509167 ISOLATOR ASSY,SP1 TBI
0043935-001 LASER ASSY, 30MW, SPECTRA-PHYSICS
0061791-000 PCB ASSY,SIGNAL PROCESSOR 2.1 SP1,CONFIG
0083729-000 PCB ASSY ANALOG DF, SP1, CONFIG
0101833-000 DISPLAY,FLAT PNL, 15",SP1-TBI
536091 BEAMSPLITTER ASSY,BF-DF,SP1-TBI
571024 LASER ASSY,SP1-DLS
0029941-001 PWR SUPPLY,LASER,75 MW,SP1-DLS
571113 LASER ASSY,HENE,BF,SP1-DLS
0014703-000 BF LSR HV PWR SUPPLY SP1 XP
560545 PCB ASSY,ACTUATOR,SP1 XP CONF
570761 670.ASSY,PWR DISTRIBUTION,SP1 XP CONFIG
558630 PCB ASSY,ANALOG SP1-DLS,CONFIG
0014790-000 PCB ASSY,TIMING GENERATOR SP1 XP
0065932-001 CPU ASSY,1GHZ 1GB,CONFIG ROCKETPORT/DVD-
0015948-000 ULPA ASSY,W/GORE-TEX,220VAC,SP1-DLS
0046681-000 ASSY,BLWR FAN UNIT W/BRAKE,AIT
0015277-000 DISPLAY,FLAT,PANEL 18"
560502 PCB ASSY,LASER NODE,SP1 XP
0082099-000 PCB ASSY, 8 SERIAL, ROCKETPORT, PCI, RS2
571008 PMT ASSY,NARROW,SP1-DLS
570990 PMT ASSY,WIDE,SP1-DLS
571016 PMT ASSY,SP1-DLS
0018987-000 LASER SAFETY SHUTTER ASSY,SP1 DLS
0048209-001 SPINDLE, SP1
0048210-000 CONTROLLER, SP1 SPINDLE
0056119-000 PWR SUPPLY,MODULAR,650W,CONFIG
0061791-000 PCB ASSY,SIGNAL PROCESSOR 2.1 SP1,CONFIG
0016519-000 BEAM SPLITTER ASSY,BF,SP1-DLS
GaSonics
P/N DESCRIPTION
06-0091-01 PLASMA CHAMBER
06-0142 MIDDLE SHOWERHEAD PLATE
06-2431/A QUARTZ PIN
14738-01 QUARTZ BUBBLER
15367-01 QUARTZ PINS, INSIDE CHAMBER LIFT
16159-02 ANODE COPPER SHIELD
16337-01 QUARTZ CHAMBER LINER
16337-02 QUARTZ CHAMBER LINER
16531-01 ROD, SMALL, DIFFUSER LAMP
16532-01 QUARTZ LAMP PLATE
16784-01 SPOOLER
17302-01 WELDMONT TOP SHOWERHEAD
17303-01 QUARTZ SHOWERHEAD
17304-01 WELDMONT BOTTOM SHOWERHEAD
17621-01 6" PLATE GAS DISTRIBUTION, QUARTZ
17622-01 DIFFUSER QUARTZ PLATE
A06-001-01 WINDOW VENTED, QUARTZ
A06-002-01 WINDOW, QUARTZ
A06-005-01 SHOWERHEAD, QUARTZ
A06-010-01 ASHER TUBE
A06-012-01 DIFFUSION DISK, QUARTZ
A06-300-01 QUARTZ WINDOW 9 1/2
A06-301-01 QUARTZ WINDOW 10"
17688-01 200MM PLATE GAS DISTRIBUTION/SHOWERHEAD
71805-01 QUARTZ WINDOW=EOP/1.25 DIA S 1/8
16-1071-16 Screw, Shoulder, 3/16 x 1
18-0273-42 Screw, 2-56 X 3/16L 100 Degrees
18-0281-01 Screw, 2-56 X 1/4 SCHS BLK Oxide
20-0218-01 Gasket, VCR, 1/4" SS
20-0238-01 Gasket, VCR, 1/8: SS
22-0303-03 Valve, Solenoid 3-Way (Pneumatic Enable)
40-0011-00 Fuse, 1/2 Amp
A01-003-01 Ring, EMI Shield
A01-071-01 Pin, Wafer Support
A01-071-02 Pin, Wafer Support, Short
A02-082-01 Bracket, Front Wafer Support
A02-083-01 Wafer Frame
A02-084-01 Bracket, Rear Support 6"
A02-084-02 Bracket, Rear Support 5"
A02-084-03 Bracket, Rear Support 4"
A02-084-04 Bracket, Rear Support 3"
A06-010-01 Tube, Plasma Quartz
A17-001-01 Spring, Compression (Gas Cap)
A22-003-02 Valve, Pneumatic, Nupro
A22-010-03 Valve, Solenoid, 3-Way
A39-001-01 Lamp, 1000W, 120VAC
A39-005-01 Lamp, 24V
A39-006-01 Lamp, 1000W, 225VAC
A58-001-01 Relay, Solid State, 25A
A58-001-02 Relay, Solid State, 50A
A58-002-01 Relay, 24V, Mechanical
A78-005-01 O-Ring, Silicone, Chamber, Upper Inner
A78-006-01 O-Ring, Silicone, Chamber, Upper Outer
A78-007-01 O-Ring, Silicone, Chamber, Bottom Cover Plate
A78-008-01 O-Ring, Silicone, Chamber, Bottom Quartz
A78-009-01 O-Ring, Silicone, Chamber, Door
A78-014-01 O-Ring, Silicone, EOP, Outer
A78-016-01 O-Ring, Silicone, EOP, Inner
A78-021-01 O-Ring, Silicone, Atmosphere Switch
A78-022-01 O-Ring, Viton, U-Torr
A78-029-01 O-Ring, Silicone, Teflon Coated SS Valve
A78-030-01 O-Ring, Silicone, Teflon Coated MV Valve
A78-034-01 O-Ring, Chemraz, Plasma Tube, Bottom, Large
A78-036-01 O-Ring, Chemraz, Plasma Tube, Top, Small
A93-032-01 Tubing, Flexline (Gas Line)
A95-028-01 Assembly, Interlock, Switch
A95-045-01 Assembly, Magnetron
A96-018-03 Assembly, HV Cable, 50Hz
34-0073-01 Lug, Ring #6, 22-18 AWG, Pink
36-7000-01 Capacitor, High Voltage, Microwave (1.1 MFD)
38-0052-01 Circuit Breaker, 1A
38-0053-01 Circuit Breaker, 2A
90-1036-01 PCA, MFC Interfacing
A01-003-01 Ring, EMI Shield Magnetron
A01-071-01 Pin, Wafer Support
A01-071-02 Pin, Wafer Support Short
A17-007-01 Bearing, Door Guide, Ball Bushing
A17-015-01 Shock Absorber, Door
A17-028-01 Shock Absorber, Arms
A20-005-01 Fitting, Ultra-Torr Tee 1/4
A22-003-02 Valve, Pneumatic, NuPro
A22-005-01 Valve, Solenoid, 4-Way, Double miniature
A22-006-01 Valve, Solenoid, 3-Way, Miniature
A22-024-01 Valve, Vacuum, NW16, Chemraz 515 O-Ring
A22-025-01 Valve, Vacuum, NW40, Chemraz 515 O-Ring
A23-001-01 Mass Flow Controller, 02, 0-10 SLPM
A35-002-01 Diode Microwave
A38-009-01 Circuit Breaker, 12A 32VDC/250VAC 50/60 Hz 1 Pole Lamps
A57-006-01 Cylinder, Air, Double Acting, 9.5" STR
A60-010-01 Transformer, Filament, Magnetron, 120V 50/60 Hz
A78-024-01 O-Ring, 014 (.489 ID X .070 C/S) Conductive
A78-029-01 O-Ring, 2-213 (.921 ID X .139 C/S) Silicone, Teflon Encapsulated
A90-003-01 Assy, Interlock Board
A90-004-01 Assy, Optical Interrupt Sensor
A90-005-02 PCA, Aura, Controller Board, Pick and Place W/SECS II
A95-006-01 Assy, EOP W/Housing, 60Hz
A95-027-04 Assy, Prefire, W/Electrode
A95-041-01 Assy, Aura, Sensor, Load , Short 
A95-070-01 Assy, Transformer, 50/60 Hz High Voltage
A95-206-01 Assy, Aura Tuning Rod
36-7000-01 Capacitor, High Voltage, Microwave (1.1 MFD)
90-1036-01 PCA, MFC Interfacing
A01-071-01 Pin, Wafer Support
A01-071-02 Pin, Wafer Support Short
A22-003-02 Valve, Pneumatic, NuPro
A22-005-01 Valve, Solenoid, 4-Way, Double miniature
A22-006-01 Valve, Solenoid, 3-Way, Miniature
A22-024-01 Valve, Vacuum, NW16, Chemraz 515 O-Ring
A22-025-01 Valve, Vacuum, NW40, Chemraz 515 O-Ring
A23-001-01 Mass Flow Controller, 02, 0-10 SLPM
A35-002-01 Diode Microwave
A38-009-01 Circuit Breaker, 12A 32VDC/250VAC 50/60 Hz 1 Pole Lamps
A57-006-01 Cylinder, Air, Double Acting, 9.5" STR
A95-006-02 Assy, EOP W/Housing, 50Hz
A95-030-01 Assy, Display Panel