Created and driven by R&D, the XE-LAB fills the gap between research and development and production ready processes for Patterned Sapphire Substrates (PSS).
Designed for plug & play operation and safety the XE-LAB gives you the same high temperature etch advantage as the larger XE-Series process tank, without the need for a fully automated wet station.
With an automated lid and end effector to lower substrates in to the tank, the operator has the ability to safely operate the unit from a distance. The control module which is included with the system, can handle all the operator inputs from a remote location. Controlling lowering speed, lid speed, and temperature control all from one easy to use module.
Included in the package:
- High Temperature 300°C+ Quartz Tank
- Automated Lid & End Effector
- Automation & Temperature Control Module
- Quartz Wafer Boat & Carrier
- Unloading Handle
Video - Safe Operation of Lid & Elevator
For more information contact your local representative.
In 1982, Imtec introduced the Accubath quartz heated tank and it
quickly became the standard for quality and performance for
Semiconductor manufactures worldwide.
Throughout its history, Imtec has taken
pride in listening to its customers and responding with products to
meet the stringent requirements of an evolving industry.
We were the first with a dedicated Nitride
etch system to improve uniformity, performance, and reliability, and
later introduced the Aquaseal®, the most important improvement ever made
for increasing service life.
The 190°C limitation of the standard Accubath
has been more than adequate for the semiconductor industry but with new
processes being developed for emerging industries, there is a need for
Once again, Imtec is responding with the new
Xe series for extreme duty applications up to 300°C. We have used our
knowledge from building tens of thousands of quartz heated baths and
analyzing failure modes to understand and meet the challenges posed when
running chemistries at extreme temperatures.
Through innovative thinking and careful
design, the challenges have been met enabling our customers to make
their own breakthroughs.
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