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accumeg - megasonic cleaning systems
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Accumeg

“Gapless” Transducer- For better process uniformity in the tank, the piezoelectric crystals on the transducer should be installed as close together as possible. However, when each crystal is wired to the generator individually, they must be spaced at least 1mm apart to avoid arcing that shorts out the transducer.

Imtec uses superior transducers with tightly matched crystals wired together in parallel. This means that there is a small potential difference between crystals and they can be placed close together- 0.1mm apart- without risk of shorting

Megasonic Quick Dump Rinse Bath (QDR)- To quickly remove chemical and particulate from a bath after a process run, Imtec developed and patented the QDR Accumeg. Rather than disturbing the bottom of the bath where the transducer is mounted, the Imtec system raises the walls of the bath, allowing the chemical to flow out evenly and rapidly, and without allowing any particulate settled at the bottom of the bath to re-attach to the substrate. This “tank lift” system maintains a clean environment and saves valuable processing time.