The use of megasonic technology has been shown to be an essential performance element in advanced cleaning applications. Combining over 30 years of industry know-how with some of the most reliable megasonic components available, Imtec has designed a cleaning system for a wide-range of high-purity processes: the Accumeg.

The Accumeg is designed to provide continuous megasonic energy across the full width and depth of all the substrates in the process vessel. This constant energy is the key to complete, fast, efficient cleaning and the elimination of particle reattachment

Unlike other systems, which use “pulsed” or “fan dispersed” transducer arrays in an attempt to achieve even, full coverage, Accumeg megasonic array covers the entire process load capacity of the tank without any of the energy loss associated with “shadowing” or “sequencing” the energy to the surface of the wafers.

Backed by our extensive 36 month warranty, Imtec’s Accumeg series offers the reliability and productivity that ensures excellent uptime, minimum maintenance and the lowest cost of ownership.

Complete Accumeg systems are available in a wide range of tank materials, styles, and sizes.

Tank Styles: Recirculating, Quick Dump Rinser