Reliable Components: All Accumeg baths and systems carry the IMTEC extensive 36 month warranty.

Quartz Recirculating Cleaning Systems:

Reduces Processing Time- Continuous Full Coverage megasonic energy provides shorter processing times at lower temperatures with no damage
Easier to Replace Transducers: Lower MTTR, field replaceable transducer arrays minimize inventory cost of spares.

Flexible Designs: Available in cassette and cassette-less configurations for up to 300mm and larger flat panel display applications

Higher MTBF: Megasonic components rated > 50,000 hours MTBF

Higher Watt-Densities: Watt-densities of up to 5.4/cm2 and above provide more power for tougher jobs

Quick Dump Rinser

Extends Usable Tank Life: Phosphoric and sulfuric acid applications can be extended up to 400%, reducing chemical usage

Reduces DI Water Consumption: Up to 80% reduction compared to overflow rinsing

Faster, More Complete Rinsing: Process times reduced by up to 75% by removing chemistry from the wafer and cassette surfaces more rapidly. Drains in < 2 sec. through 360° opening.

Prevents Particle Reattachment: Reduced defect density

Operates at up to 70°C: Use hot DI for post-phosphoric and sulfuric acid applications

Stainless Steel Solvent Resist Stripping Systems

Higher Operating Temperatures: Processing up to 70°C. Higher processing temperatures of up to 130°C possible when using the water-inter-layer-coupled transducer design in quartz recirculating systems

Safe Tank Operation: Rugged tanks and multiple redundant interlocks

Eliminates Resist Re-deposition and Reattachment: Continuous Full Coverage megasonic energy effectively eliminates resist re-deposition and particle reattachment.