Heated Quartz Tank - ACCUBATH

Imtec has set the global standard for both static and recirculating heated quartz baths. Our complete line of Accubath systems deliver unsurpassed process performance, reliability, and safety in wet systems throughout the world. Our commitment to engineering excellence has consistently given Imtec's customers exceptionally dependable and advanced process equipment. The Accubath combines the highest quality materials and engineering designs to create a quartz bath that enhances your process.

Our quartz tanks are suitable for use in processes using quartz-compatible chemistries up to 190°C. Quartz is known for its durability and non-reactivity to a variety of chemistries. We employ experienced quartz welders and machinists to create high purity, uniform tanks in a variety of standard and custom sizes, with the ability to add high-strength welded quartz inlets and probe holders.

For the most rigorous processes, we offer our patented AquaSeal technology, which protects against the leading cause of vessel failure. It incorporates a dual sealing feature by directing DI water to flow over the RTV seal area, cooling it while forming a barrier against chemical fumes.

Please see our material compatibility chart to find out which material works best for your process.

quartz heated static tank quartz recirculating tank nitride etch quartz recirculating tank

Recirculating Quartz Heated Tanks

Smaller Footprint - Vertically built saving approximately 3 inches of wet-system linear deck space per vessel.

Higher Particle Removal Efficiency - Patented raised 360° weir with scalloped 45° knife edge rim pulls particles over the weir edge.

Better Performance - Patented sump designed to reduce low liquid level heater problems and to prevent recirculating pump air ingestion.

Longer Life - Patented AquaSeal, high-strength welded quartz inlet and outlet ports, and patented raised weir design ensures superior vessel life.

Static Quartz Heated Tanks

High Operating Temperatures - Operates up to 190° and can be used with any quartz compatible chemistries.

Flexibility - Variety of standard and custom sizes available. Multiple drain configurations and a complete line of accessories allow for easy integration.

The following are general specifications that apply to Accubath Quartz heated baths. Model specific information is supplied with each bath:

Please also review our material compatibility table here

Tank Material: Virgin Annealed quartz, firepolished.
Housing Material, Standard: Fire Retardant Polypropylene
Housing Material, FM 4910 Optional PVDF
Overtemperature sensor 1: Two (2) J-type thermocouples
Overtemperature sensor 2: Thermostatic snap switch (opens at 210°C +/- 7°C)
Heater Elements Low watt density Inconel foil
Insulation: High Density Aluminum Silicate
Maximum operating temperature: 190°C.
Operating voltage: Model dependent
Limited Warranty: One Year standard or 30 months for tanks with Aquaseal

IMTEC has been supplying the semiconductor industry since 1972. Our commitment to engineering excellence has consistently given IMTEC’s customers exceptionally dependable and advanced process equipment. The ACCUBATH combines the highest quality materials and engineering designs to create vessels that enhance your process.

Download detailed information about: Accubath
Download detailed information about: Accubath QZ Lite Series
Download detailed information about: Accubath Quartz Recirculating
Download detailed information about: Aquaseal
Download detailed information about: Accubath Nitride Etch System