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02/14 PPB Announces lower meter pricing

04-Feb-2014

As a longtime distributor and user of PPB ultrasonic/megasonic cavitation meters (/ultraso..

10/13 IMTEC Emphasis On People Development And Community Outreach

31-Oct-2013

IMTEC Acculine Committed to Community Building in Silicon Valley and Beyond FREMONT, Calif., Oct..

08/13 Nison Custom Designed Replacement Quartz In-line Heater

05-Aug-2013

Imtec today fabricated its 30th unit of a specially configured..

04/12 Imtec Acculine Celebrates 40th Anniversary

01-Apr-2012

Formed in 1972, Imtec has been providing quality products and services to the Semiconducto..

12/11 Imtec Acculine Inc. Name Change

15-Dec-2011

This announcement is to inform you that Imtec Acculine, Inc. will become Imtec Acculine, LLC on ..

MORE NEWS

Comparing Resistive vs. IR Heaters for Liquid Heating

The ability to heat a process tank, keep the temperature controlled, and do no damage to the heating element has, like other processes in semiconductor manufacturing, improved over time. With the increased emphasis on throughput and uptime, fabs are hesitant to schedule repetitive preventative maintenance of such items as process tank inline heaters. Other equipment applications in billion dollar fabs are more worthy of maintenance time and talent.

The infrared (IR) heater – often called radiant heating - was the standard in the semi industry for many years. Reflectors to generate increased temperature typically surrounded a quartz heating lamp.

IR (Infrared) heating has its problems:

  • works well for heating H2O but has limitations for other liquids a large amount of input energy is wasted in the visual spectrum.
  • IR lamps don’t last long; usually PMs are scheduled every 6-12 months.
  • It’s not easy to capture the radiant heat; often the lamp sockets and other internal components fail prematurely.
  • A “cooling” system is sometimes used to address component failure.
  • IR heating is typically flow-dependent; if there is no liquid flow, safety concerns arise.

Resistive heating has its advantages:

  • No maintenance: there are no seals, lamps or cooling purges needed.
  • Non-flow dependent meaning that no flow sensing device is required to meet Semi S3 requirements.
  • Heater elements are in direct contact with the outer quartz surface making heat transfer efficient.
  • Conductive heat is better absorbed by chemicals such as sulfuric, nitric, and phosphoric acids.
  • Resistive heater elements can be monitored to provide maximum heat transfer at varying flow rates and conditions.
  • Low external housing surface temperatures result, usually no higher than 50° C
quartz inline heater

In many cases, IR heaters can be replaced by Resistive heaters in existing equipment without making major modifications. By utilizing special sensors and other components Imtec can mimic the functionality of the old heater to eliminate the need for modifications to the control system. In some cases, special mounting brackets or plumbing connections can be used to simplify installation.

In almost any inline heating application, if you are not satisfied with the heater’s performance or reliability, we can help. For more information about our resistive heaters, click here or contact a Imtec representative.