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| Outstanding performance in megasonic cleaning requires precise integration of technology and components. IMTEC combines over 30 years of wet processing experience with the most reliable megasonic components available to offer ACCUMEG™ Complete Megasonic Cleaning Systems. Backed by our 36 month warranty, ACCUMEG™ Megasonic Systems provide effective process performance with the reliability and repeatability that wet process applications demand. |
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| The ACCUMEG™ is designed to provide continuous high megasonic energy across the full width and depth of all the wafers in the process vessel. This constant energy is the key to complete, fast, efficient cleaning and the elimination of particle reattachment. | |||||||||||||||||
| Tank Styles: Recirculating Quick Dump Rinser Cascade Rinser |
Tank Materials: Quartz PVDF Stainless Steel |
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| Standard Sizes: Single and dual 150, 200 and 300mm Standard and cassetteless Custom Sizes available for other applications |
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