Accubath Sales

Static Tanks (contact us for more details)

QZ-A2002 Quartz static bath without drain for dual 200mm cassettes. Tank has 3 separate heater elements for balanced three phase connection. p/n 10-000-1114.

$10,140.00

$3,000.00

QZ-U1502 Custom Quartz static bath without drain for dual 150mm cassettes. Tank has special brackets for holding tubes and probes as well as floor rails for locating cassettes. One Available.

P/N 10-000-1863

$9,600.00

$4,800.00

ST-A1502 Teflon Coated Stainless Steel heated bath without drain. 208-240VAC.

P/N 10-000-1578

$4,960.00

$3,000.00

ST-A1002 Teflon Coated Stainless Steel heated bath without drain for two, 4-inch cassettes. 208-240VAC.

P/N 10-000-2077

Two Available

$4,640.00

$3,000.00

QN-C2002 Quartz Nitride Etch bath with integral collar. Has a ¾” Flaretek elbow drain fitting. Can be used with either an end or side opening auto lid (sold separately) to create a Silicon Nitride Etch system.      
        
3 tanks available.
 p/n 99-000-1499

$24,400.00

$9,810.00

QN-D2002 – 200mm Nitride Etch System with Integral Collar, and End Opening auto lid. A custom designed Nitride Etch system used in some of the most advanced fabs in the world. Designed for a 52 wafer reduced cassette but could also be used with dual 150mm cassettes. Has dispersion plate studs and enough ports to meet almost any requirement. Allow 1-2 Weeks for Delivery. Two available.

P/N 99-000-1124

$22,200.00

$11,165.00

AN/ST-1501 Teflon coated stainless static bath with integral condensing collar and manual lid. This was built for a stand alone bench top KOH system. The tight sealing lid and condensing collar help maintain chemical concentration and the anisotropic qualities of the etch. This was made several years ago for a show using construction techniques that have been phased out. Only the tank with lid and stir motor is included. The other components shown on the drawing are not included. Tank is guaranteed for 60 days from date of shipment only. 208 VAC heaters to be added. Allow 2-4 weeks for delivery.

p/n 10-000-1402

$11,200.00

$1,500.00

SS-A1502 dual 150mm Stainless Steel bath without drain and PVDF housing. Built for Trade show without heaters so allow 2 weeks to add them. p/n TBD.

$4,828.00

$2,500.00

ST-A1251 Single 5 inch Teflon Coated Stainless Bath without drain. Built for Trade show without heaters so allow 2 weeks to add them. p/n TBD.  No drawing available.

$3,920.00

$1,500.00

Recirculating Tanks (contact us for more details)

AP-P-V/O-2052 PVDF Quick dump rinse tank sized for a 50/52 200mm wafer process enhanced cassette. May also be used with two 150mm cassettes. High quality Origami tank made for show. Cassettes will sit on tank bottom or furniture can be added for an additional charge. Drawing only shows general construction. Not dimensionally accurate. Tank has an I.D. of 17.0 X 11.0 X 13.0” Deep. p/n 10-004-4412

$4,964.00

$1,500.00

AP-P-Q/D-3052 PVDF Quick dump rinse tank with full bottom drop. High quality Origami tank made for show. Has no cassette furniture, which is needed for proper operation. Have it added by Imtec for an additional charge or install yourself. No drawing available. Tank has an I.D. of 15.25 X 12.25 X 14.5” Deep.

P/N 10-004-4211

$7,329.00

$2,000.00

ST-R/S-200 Teflon coated Stainless Steel Recirculating bath for dual 200mm cassettes. Tank is oversized with an I.D. of 455 X 300 X 306mm Deep. Tank was built for show use without heaters. Use as unheated bath or Imtec can add heaters for an additional $1,600.00. A Teflon dispersion plate is optional and recommended to protect coating on tank bottom.

P/N TBD Refer to drawing for item 19.

$15,000.00

$3,500.00

SS-R/S-200 Stainless Steel Recirculating bath for dual 200mm cassettes. Tank is oversized with an I.D. of 455 X 300 X 306mm Deep. Tank was built for show use without heaters. Use as unheated bath or Imtec can add heaters for an additional $1,600.00.

P/N 10-000-1928.

$10,500.00

$3,000.00

QRT/S-G2001 – Quartz Recirculating heated bath for a single 200mm cassette or dual 150mm cassettes. Tank is made from ultra-pure plate quartz and has dispersion plate studs and one set of probe holders. Plumbing connections are ¾” quartz flared stems. One available to ship immediately.

P/N 10-000-1896

$21,850.00

$9,800.00

QRT/S-A1502 – Quartz Recirculating heated bath for dual 150mm cassettes. Tank is made from ultra-pure quartz and has custom inlet stems. Plumbing connections are ¾” Flaretek Elbows.

P/N 10-000-1110

$15,364.00

$8,860.00

QRT/S-A1002 – Quartz Recirculating heated bath for dual 100mm cassettes. Tank is made from ultra-pure plate quartz. Plumbing connections are ¾” Flaretek Elbows. One available to ship immediately.

P/N 10-000-1761

$15,220.00

$6,100.00

AQRT/S-E3050 Heated quartz recirculating tank with Aquaseal for 300mm wafers. Custom plate quartz tank with many special features.

P/N 99-000-2155

$30,517.00

$20,450.00

AQN/RT/S-A1502 Dedicated Nitride Etch  system. Integral collar and side opening autolid, t/c holders, and disperision plate studs. High end tank built for show use. Allow 1 week for delivery.

P/N 10-000-1983

$27,659.00

$16,000.00

STR/S-A1501 Teflon Coated Stainless Recirculation bath with one sided overflow. Heaters are 200 to 240VAC and connections are Flaretek elbows. Has old style PFA coating with limited 90 day warranty.

P/N 10-000-1686

$7,770.00

$1,500.00

QRT/S-A1502 – Quartz Recirculating heated bath for dual 150mm cassettes. Tank is made from ultra-pure quartz and has an overflow tube in the sump. Heaters are 240V and Plumbing connections are ¾” Flaretek Elbows.

P/N 10-000-2088

$17,105.00

$14,180.00